Bi-stable planar polysilicon microactuators with shallow arch-shaped leaf springs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3876, Issue , 1999, Pages 274-279

  Lee, Jong Hyun ^a   Lee, Myung Lae ^a   Jang, Won Ick ^a   Choi, Chang Auck ^a   Joo, Jin Won ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; FINITE ELEMENT METHOD; MICROMACHINING; NATURAL FREQUENCIES; OPTICAL SWITCHES; RESIDUAL STRESSES; SILICON; VIBRATIONS (MECHANICAL);

ARCH SHAPED LEAF SPRINGS; ELASTIC STABILITY; GAS PHASE ETCHING; LOW TEMPERATURE OXIDE; PLANAR MICROACTUATORS; POLYSILICON; STATIC BUCKLING MODES;

MICROACTUATORS;

EID: 0033353074     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)