Structural fabrication of a ring-type motion sensor

Journal of Micromechanics and Microengineering

Volumn 14, Issue 5, 2004, Pages 710-716

  Weng, Jui Hong ^a   Chieng, Wei Hua ^a   Lai, Jenn Min ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b Opto Tech Corporation Taiwan   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ANODES; ASPECT RATIO; CHEMICAL BONDS; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; ERROR ANALYSIS; ETCHING; MICROELECTROMECHANICAL DEVICES; MOTION CONTROL; SENSORS; SILICON WAFERS;

ANODIC BONDING; ASPECT RATIO DEPENDENT EFFECT (ARDE); MOTION SENSORS; STRUCTURAL FABRICATION;

MICROMACHINING;

EID: 2542493871     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/5/008     Document Type: Article

References (36)

1. Keister G W 1992 Sensors and Transducers ECN 21-32
2. Baxter L K 1997 Capacitive Sensors Design and Applications (New York: IEEE Press)
3. The vibration gyroscope 1993 British Aerospace Systems and Equipment Report TR5102
4. Lawrence A 1993 Modern Inertial Technology Navigation Guidance and Control (New York: Springer) pp 163-81
5. Lawrence A 1993 Modern Inertial Technology Navigation Guidance and Control (New York: Springer) pp 148-62
6. Quick W H 1964 Theory of the vibrating string as an angular motion sensor Trans. ASME, J. Appl. Mech. 31 523-34
7. Gates W D 1968 Vibrating angular rate sensors may threaten the gyroscope Electronics 10 130-4
8. Lawrence A 1993 Modern Inertial Technology Navigation Guidance and Control (New York: Springer) pp 149-51
9. Boocock D and Maunder L 1969 Vibration of a symmetry tuning fork J. Mech. Eng. Sci. 114
10. Parameswaran L, Hsu C and Schmidt M A 1995 A merged MEMS-CMOS process using silicon wafer bonding Proc. IEEE Int. Electron Devices Mtg. (Washington, DC, Dec. 1995)
11. Greiff P, Boxenhom B, King T and Nues L 1991 Silicon monolithic micromechanical gyroscope Tech. Dig. 6th Int. Conf. Solid-State Sensors and Actuators, Transducers'91 (San Francisco, CA, June 1991) pp 966-8
12. Clark W A, Howe R T and Horowitz R 1996 Surface micromachined-axis vibratory rate gyroscope Tech. Dig. Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC, June 1996) pp 283-7
13. Juneau T and Pisano A P 1996 Micromachined dual input axis angular rate sensor Tech. Dig. Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC, June 1996) pp 299-302
14. Geiger W, Folkmer B, Merz J, Sandmaier H and Lang W 1998 A new silicon rate gyroscope Proc. IEEE Micro Electro Mechanical Systems Workshop, MEMS'98 (Heidelberg, Germany, Feb. 1998) pp 615-20
15. Juneau T, Pisano A P and Smith J H 1997 Dual axis operation of a micromachined rate gyroscope Tech. Dig. 9th Int. Conf. Solid-State Sensors and Actuators, Transducers'97 (Chicago, IL, June 1997) pp 883-6
16. Putty M W and Najafi K 1994 A micromachined vibrating ring gyroscope Tech. Dig. Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC, June 1994) pp 213-20
17. Gretillat F, Gretillat M-A and de Rooij N F 1999 Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitation IEEE J. Microelectromech. Syst. 8 243-50
18. Sparks D R, Zarabadi S R, Johnson J D, Jiang Q, Chia M, Larsen O, Higdon W and Castillo-Borelley P 1997 A CMOS integrated surface micromachined angular rate sensor: it's automotive applications Tech. Dig. 9th Int. Conf. Solid-State Sensors and Actuators, Transducers'97 (Chicago, IL, June 1997) pp 851-4
19. Ayazi F and Najafi K 2001 A HARPSS ploysilicon vibrating ring gyroscope IEEE J. Microelectromech. Syst. 10 169-79
20. Selvakumar A and Najafi K 1994 High density vertical comb array microactuators fabricated using a novel bulk/poly-silicon trench refill technology Tech. Dig. Solid-State Sensor and Actuator Workshop (Hilton Head Island, SC) pp 138-41
21. Fox C H J and Hardie D S W 1984 Vibratory Gyroscopic Sensors Symp. Gyro Technology DGON
22. Burdess J S and Wren T 1986 The theory of a piezoelectirc disc gyroscope IEEE Trans. Aerosp. Electron. Syst. 22 411-8
23. Gallacher B J, Burdess J S and Harris A J 2001 Principles of a three-axis vibrating gyroscope IEEE Trans. Aerosp. Electron. Syst. 37 1333-43
24. Loper E J and Lynch D D 1983 Projected system performance based on recent HRG test results Proc. 5th Digital Avionics System Conf. (Seattle, WA, Nov. 1983)
25. Roylance L M and Angeel J B 1979 A batch-fabricated silicon accelerometer IEEE Trans. Electron Devices 26 1911-7
26. Seidel H, Riedel H, Jolbeck R, Muck G, Kuoke W and Koniger M 1990 Capacitive silicon accelerometer with highly symmetrical design Proc. 5th Int. Conf. Solid State Sensors Actuators pp 312-5
27. Okada K 1995 Tri-axial piezo-electric accelerometer Transducer'95, (25-29 June) pp 566-9
28. Puers B, Reynaret L, Soneyw W and Sansen W M C 1988 A new unaxial accelerometer in silicon based on the piezo-junction effect IEEE Trans. Electronic Device 35 764-70
29. Hiratsuka R, Duyn D C V, Otaredain T and de Vries P 1992 Design consideration for the thermal accelerometer Sensors Actuators A 32 380-5
30. Abbaspour-Sani E, Huang R S and Kwok C Y 1994 A linear electro-magnetic accelerometer Sensors Actuators A 44 103-9
31. Liu Cheng-Hsien and Kenny T W 2001 A high-precision, wide-bandwidth micromachined tunneling accelerometer IEEE J. Microelectromech. Syst. 10 425-33
32. Weng J H, Chieng W H and Lai J M Structural design and analysis of the micromachined ring-type vibrating microsensor sensing both yaw rate and linear acceleration Sensors Actuators submitted
33. Yazdi N, Ayazi F and Najafi K 1998 Micromachined inertial sensors Proc. IEEE 86 1640-59
34. Bruschi H and Torzo G 1987 Method for accurate resonant frequency measurement with a phase modulated feedback loop Rev. Sci. Inst. 58 2181-4
35. Eley R, Fox C H J and McWilliam S 1999 Anisotropy effects on the vibration of circular rings made from crystalline silicon J. Sound Vib. 228 11-35
36. Lai J M, Chieng W H and Huang Y-C 1998 Precision alignment of mask etching with respect to crystal orientation J. Micromech. Microeng. 8 327-9