Product development of a MEMS optical scanner for a laser scanning microscope

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 552-555

  Miyajima, Hiroshi ^a   Asaoka, Nobuyoshi ^a   Isokawa, Toshihiko ^a   Ogata, Masanori ^a   Aoki, Yukihiro ^a   Imai, Masaharu ^a   Fujimori, Osamu ^a   Katashiro, Masahiro ^a   Matsumoto, Kazuya ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; MICROSCOPES; MIRRORS; OPTICAL DEVICES; OPTICS; PRODUCT DEVELOPMENT; RELIABILITY; SCANNING;

LASER SCANNING MICROSCOPE; MICROELECTROMECHANICAL OPTICAL SCANNER;

MICROELECTROMECHANICAL DEVICES;

EID: 0036124289     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984331     Document Type: Article

References (3)

1. An electromagnetic optical scanner with polyimide-based hinges
2. A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges
3. Silicon micro-optical scanner