A MEMS gimbal scanner for a miniature confocal microscope

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 9-10

  Murakami, K ^a   Kamiya, Y ^a   Karatsu, K ^a   Miyajima, H ^a   Katashiro, M ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MIRRORS; MOEMS; Q FACTOR MEASUREMENT; SILICON NITRIDE;

MEMS GIMBAL SCANNER; MINIATURE CONFOCAL MICROSCOPE; Q-FACTORS; SCAN ANGLE;

SCANNING;

EID: 84963739825     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031418     Document Type: Conference Paper

References (3)

1. D.L.Dickensheets,et.al.,JMEMS, Vol7,No.1,1998,pp.38-47
2. W.Piyawattanametha,et al.,Transducers'01,2001, 2B2.05 pp.590-593
3. D.L.Dickensheets,et.al.,Opt-electronics'97,SPIE Conference on micromachining and imaging [3009.20]