Nanoimprinted organic field-effect transistors: Fabrication, transfer mechanism and solvent effects on device characteristics

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 809-813

  Kam, A P ^a   Seekamp, J ^a   Solovyev, V ^a   Cedeño, C Clavijo ^a   Goldschmidt, A ^a   Sotomayor Torres, C M ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

Nanoimprint lithography; Organic field effect transistors; Short channel effects

Indexed keywords

ANELASTIC RELAXATION; FIELD EFFECT SEMICONDUCTOR DEVICES; MOLECULAR STRUCTURE; NANOTECHNOLOGY; OPTICAL FIBER FABRICATION; PHOTOLITHOGRAPHY; SEMICONDUCTING ORGANIC COMPOUNDS; THROUGHPUT; TOLUENE; VACUUM TECHNOLOGY;

DICHLOROMETHANE; NANOIMPRINT LITHOGRAPHY; ORGANIC FIELD-EFFECT TRANSISTORS (OFET); SHORT CHANNEL EFFECTS;

FIELD EFFECT TRANSISTORS;

EID: 2542473700     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00225-4     Document Type: Conference Paper

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