Tracking control of a piezo-actuated stage based on frictional model

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5757, Issue , 2005, Pages 481-490

  Huang, Yi Cheng ^a   Lin, Mou Sheng ^a  

^a NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

Author keywords

Friction Force; H infinite Control; Iterative Learning Control; Piezo actuated stage

Indexed keywords

ACTUATORS; APPROXIMATION THEORY; COMPUTER SIMULATION; ERROR ANALYSIS; FRICTION; ITERATIVE METHODS; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; PRECISION ENGINEERING;

FRICTION FORCE; H-INFINTE CONTROL; ITERATIVE LEARNING CONTROL (ILC); PIEZO-ACTUATED STAGE;

NONLINEAR CONTROL SYSTEMS;

EID: 25144523943     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.604478     Document Type: Conference Paper

References (12)

1. Patrizio Tomei, "Robust Adaptive Friction Compensation for Tracking Control of Robots," Proc. IEEE International Conference on Control Applications, pp.875-880, 1999.
2. Canudas de Wit, C. and V. Seronf, "Robust Adaptive Friction Compensation," Proc. IEEE International Conference on Robotics and Automation, Cincinnati, OH, pp. 1383-1388, 1990.
3. E. D. Tung, G. Answar and M. Tomizuka, "Low Velocity Friction Compensation and Feedforward Solution Based on Repetitive Control," ASME Journal of Dynamic Systems, Measurement, and Control, Vol. 115, pp.279-284, 1993.
4. M.K. Ciliz and M. Tomizuka, " Neural Network Based Friction Compensation in Motion Control, " Electronics Letters, Vol. 40, No. 12, June 2004.
5. Swevers, J., Al-Bender, F., Ganseman, G.,andPrajogo, T., "An Integrated Friction Model Structure With Improved Presliding Behavior For Accurate Friction Compensation," IEEE of Trans, on Automatic Control, Vol. 45, pp. 675-686, 2000.
6. Lampaert, V., Swevers, J., and Al-Bender, F.,"Modification of the Leuven Integrated Friction Model Structure," IEEE Trans. on Automatic Control, Vol. 47, No. 4, pp.683-687, 2002.
7. Canudas de Wit, C., Olsson, H., Aström, K., and Lishinsky, P., "A New Model for Control of systems with Friction", Trans. Automat. Contr. IEEE, Vol. 40, pp. 419-425, 1995.
8. Yi-Cheng Huang and Chih-Hao Cheng, "Controller Design of Piezoelectric Actuator with Nonminimum Phase," Journal of Technology, Vol. 18, No. 1, pp. 21-29, March 2003.
9. Yi-Cheng Huang, Mou-Sheng, Lin, Che-Ming Liu and Jyh-Chen Chen, "Motion Stage Design with Scanning-by-Probe AFM for Imaging Nanocrystals on Sapphire Surface," Vol. 25, No. 3, pp. 257-265, Journal of the Chinese Society of Mechanical Engineers, June 2004.
10. Meng-Shiun Tsai, Jin-Shin Chen, "Robust Tracking Control of a Piezoactuator Using a New Approximate Hysteresis Model," Trans. of the ASME, Vol. 125, pp 96-102, 2003.
11. E. D. Tung, Answar G. and M. Tomizuka, "Low Velocity Friction Compensation and Feedforward Solution Based on Repetitive Control," ASME J. of Dynamic Systems, Measurement, and Control, Vol. 115, pp.279-284, 1993.
12. M. Tomizuka, "Robust Digital Motion Controllers for Mechanical Systems," ELSEVIER Robotics and Automous Systems, pp. 143-149, 1996.