Semi-empirical model-based multivariable iterative learning control Of an RTP system

IEEE Transactions on Semiconductor Manufacturing

Volumn 18, Issue 3, 2005, Pages 430-439

  Cho, Moonki ^a   Lee, Yonghee ^b   Joo, Sangrae ^c   Lee, Kwang Soon ^d  

^a Conwell Company Ltd ^*  (South Korea)

^b SAMSUNG Electronics   (South Korea)

^c Kornic Systems Corporation   (South Korea)

^d Sogang University   (South Korea)

Author keywords

Iterative learning control (ILC); Linear quadratic Gaussian (LQG); Rapid thermal processing (RTP) control; RTP modeling

Indexed keywords

LINEARIZATION; MATHEMATICAL MODELS; MULTIVARIABLE CONTROL SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS;

ITERATIVE LEARNING CONTROL (ILC); LINEAR QUADRATIC GAUSSIAN (RQG); RAPID THERMAL PROCESSING (RTP) CONTROL; RTP MODELING;

ITERATIVE METHODS;

EID: 25144508011     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2005.852111     Document Type: Article

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