Advances in RTP temperature measurement and control

Materials Research Society Symposium - Proceedings

Volumn 525, Issue , 1998, Pages 71-85

  Peuse, Bruce ^a   Miner, Gary ^a   Yam, Mark ^a   Elia, Curtis ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

TEMPERATURE CONTROL; TEMPERATURE MEASUREMENT; THERMOMETERS;

MULTI-INPUT MULTI-OUTPUT (MIMO) OPTIMAL WAFER TEMPERATURE CONTROL; OPTICAL THERMOMETRY; RAPID THERMAL PROCESSING (RTP);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031621774     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-525-71     Document Type: Conference Paper

References (10)