Control of rapid thermal processing: A system theoretic approach

IEEE Transactions on Control Systems Technology

Volumn 5, Issue 6, 1997, Pages 644-653

  Cho, Young Man ^a,b   Gyugyi, Paul ^a,c  

^a IEEE   (United States)

^b UNITED TECHNOLOGIES RESEARCH CENTER   (United States)

^c NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

Convex optimization; LQG; Model identification; Rapid thermal processing; Temperature control

Indexed keywords

FEEDBACK CONTROL; HEAT TREATMENT; IDENTIFICATION (CONTROL SYSTEMS); MATHEMATICAL MODELS; OPTIMIZATION; PROCESS CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; TEMPERATURE CONTROL;

WAFER TEMPERATURE;

CONTROL SYSTEMS;

EID: 0031272440     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/87.641407     Document Type: Article

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