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Volumn 5756, Issue , 2005, Pages 351-360

The prospects for hierarchical data processing with growing complexity of the post-tapeout flow

Author keywords

Distributed; Hierarchical processing; Mask data preparation; Multithreaded; OASIS; OASIS.VSB

Indexed keywords

DISTRIBUTED COMPUTER SYSTEMS; ETCHING; OPTICAL ENGINEERING; OPTICAL RESOLVING POWER; PARALLEL PROCESSING SYSTEMS; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 25144452309     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600659     Document Type: Conference Paper
Times cited : (7)

References (16)
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    • Bacus
    • S. Schulze, P. LaCour, P.Buck, "A GDS-based Mask Data Preparation Flow - Data Volume Containment by Hierarchical Data Processing", Proc. of SPIE 4889, Bacus 2002
    • (2002) Proc. of SPIE , vol.4889
    • Schulze, S.1    LaCour, P.2    Buck, P.3
  • 2
    • 0036030920 scopus 로고    scopus 로고
    • Approaching the one billion transistor logic product: Process and design challenges
    • G.E.Sery, "Approaching the one billion transistor logic product: Process and design challenges", Proc. of SPIE 4692
    • Proc. of SPIE , vol.4692
    • Sery, G.E.1
  • 3
    • 0035765983 scopus 로고    scopus 로고
    • Hierarchical GDSII based fracturing and jobdeck system
    • N. Cobb, E. Sahouria, "Hierarchical GDSII based fracturing and jobdeck system", Proc.of SPIE 4562
    • Proc. of SPIE , vol.4562
    • Cobb, N.1    Sahouria, E.2
  • 4
    • 0036456512 scopus 로고    scopus 로고
    • High performance hierarchical fracturing
    • N. Cobb, W. Zhang, "High performance hierarchical fracturing", Proc.of SPIE 4754 p. 91-96
    • Proc. of SPIE , vol.4754 , pp. 91-96
    • Cobb, N.1    Zhang, W.2
  • 5
    • 18744379135 scopus 로고    scopus 로고
    • Generic hierarchical engine for mask data preparation
    • C. Kalus, W. Roessl, U. Schnitker, M Simecek, "Generic hierarchical engine for mask data preparation", Proc. of SPIE Vol.4754,p.66-74
    • Proc. of SPIE , vol.4754 , pp. 66-74
    • Kalus, C.1    Roessl, W.2    Schnitker, U.3    Simecek, M.4
  • 6
    • 0036456345 scopus 로고    scopus 로고
    • Distributed hierarchical processing
    • P. DePesa, D. Keogan, "Distributed hierarchical processing", Proc. of SPIE, Vol. 4754, pp.85-90
    • Proc. of SPIE , vol.4754 , pp. 85-90
    • DePesa, P.1    Keogan, D.2
  • 7
    • 2942677062 scopus 로고    scopus 로고
    • OASIS - Based data preparation flows: Progress report on containing data size explosion
    • SPIE
    • S.Schulze, P. LaCour, L. Grodd, "OASIS - based data preparation flows: Progress report on containing data size explosion", Proc. SPIE 5379 , SPIE 2004
    • (2004) Proc. SPIE , vol.5379
    • Schulze, S.1    LaCour, P.2    Grodd, L.3
  • 12
    • 0036028596 scopus 로고    scopus 로고
    • Proximity effect correction optimization considering fogging and loading effects compensation
    • S.H. Yang, Y.H. Choi, J.R. Park, Y. H. Kim, S. W. Choi, J.M. Sohn "Proximity Effect Correction Optimization Considering Fogging and Loading Effects Compensation", Proc. SPIE Vol. 4689
    • Proc. SPIE , vol.4689
    • Yang, S.H.1    Choi, Y.H.2    Park, J.R.3    Kim, Y.H.4    Choi, S.W.5    Sohn, J.M.6
  • 14
    • 25144513780 scopus 로고    scopus 로고
    • Dry etch proximity modeling in mask making
    • PMJ2003
    • Y. Granik, "Dry etch proximity modeling in mask making" , Proc. SPIE 5130, PMJ2003
    • Proc. SPIE , vol.5130
    • Granik, Y.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.