OASIS - Based data preparation flows: Progress report on containing data size explosion

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5379, Issue , 2004, Pages 149-157

  Schulze, Steffen ^a   LaCour, Pat ^a   Grodd, Laurence ^a  

^a MENTOR GRAPHICS CORPORATION   (United States)

Author keywords

GDSII stream; Hierarchical processing; Integrated circuit layout; Mask making; OASIS; Photomask

Indexed keywords

BENCHMARKING; DATABASE SYSTEMS; EMBEDDED SYSTEMS; FILE ORGANIZATION; HIERARCHICAL SYSTEMS; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUITS; MASKS; OPTIMIZATION; PROCESS ENGINEERING;

GDSII STREAM; HIERARCHICAL PROCESSING; MASK MAKING; OASIS; PHOTOMASKS;

DATA PROCESSING;

EID: 2942677062     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.535683     Document Type: Conference Paper

References (7)

1. http.//www.semi.org
2. P-Lacour, S. Schulze, A. Reich, L. Grodd, K. Nakagawa, "New stream format: progress report on containing data size explosion", Proc. of SPIE 5041, SPIE 2003
3. A. Reich, K. Nakagawa R. Boone, "OASIS vs. GDSII Stream Format Efficiency", Proc. of SPIE 5256, Bacus 2003
4. S. Schulze, P. LaCour, P.Buck, "A GDS-based Mask Data Preparation Flow - Data Volume Containment by Hierarchical Data Processing", Proc. of SPIE 4889, Bacus 2002
5. S. Schulze, E. Sahouria, E. Milsolavsky, "High performance fracturing for VSB mask writing machines", Proc. SPIE 5130, PMJ 2003
6. http://public.itrs.net/Files/2001ITRS/Litho.pdf
7. S. Schulze, K. Nakagawa, P.Buck "OASIS - progress on implementing the new stream format for containing data size explosion", GMM-F Fachbericht 43, EMC 2004