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Proceedings of SPIE - The International Society for Optical Engineering
Volumn 4889, Issue 1, 2002, Pages 104-114
A GDS-based mask data preparation flow - Data volume containment by hierarchical data processing
Author keywords

[No Author keywords available]
Indexed keywords

DATA PROCESSING; DATABASE SYSTEMS; INTEGRATED CIRCUITS; LITHOGRAPHY; THROUGHPUT; TURNAROUND TIME;
EID: 0037627759     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.468273     Document Type: Conference Paper
Times cited : (21)
References (10)
  • 1
    • 0037534932 scopus 로고    scopus 로고
    • http://public.itrs.net/Files/2001ITRS/Home.htm
  • 2
    • 0036686265 scopus 로고    scopus 로고
    • Optical lithography: The Future of mask manufacturing?
    • P. Buck, Optical lithography: The Future of mask manufacturing?; Microlithography World, V11-No.3 2002
    • (2002) Microlithography World , vol.11 , Issue.3
    • Buck, P.1
  • 3
    • 0036456577 scopus 로고    scopus 로고
    • Advanced pattern correction method for fabricating highly accurate reticles
    • S.Sato, M. Koyama, M. Katsumata, I. Kagami, H. Kawahira, "Advanced pattern correction method for fabricating highly accurate reticles", Proc. of SPIE 4754, p 196
    • Proc. of SPIE , vol.4754 , pp. 196
    • Sato, S.1    Koyama, M.2    Katsumata, M.3    Kagami, I.4    Kawahira, H.5
  • 4
    • 0036458688 scopus 로고    scopus 로고
    • Design flow automation for variable shaped beam pattern generators
    • M. Bloecker, G. Ballhorn, "Design flow automation for variable shaped beam pattern generators", Proc. of SPIE 4754 p. 116-123
    • Proc. of SPIE , vol.4754 , pp. 116-123
    • Bloecker, M.1    Ballhorn, G.2
  • 5
    • 0036458172 scopus 로고    scopus 로고
    • Advanced data preparation and design automation
    • F. Schellenberg, "Advanced Data Preparation and Design Automation", Proc.of SPIE 4754 p.54-65
    • Proc. of SPIE , vol.4754 , pp. 54-65
    • Schellenberg, F.1
  • 6
    • 0035046822 scopus 로고    scopus 로고
    • Efficient automated tapeout system
    • W. Krieger, C. Nasamran, "Efficient automated tapeout system", Proc.of SPIE 4186, p. 140-147
    • Proc. of SPIE , vol.4186 , pp. 140-147
    • Krieger, W.1    Nasamran, C.2
  • 7
    • 0035765983 scopus 로고    scopus 로고
    • Hierarchical GDSII based fracturing and jobdeck system
    • N. Cobb, E. Sahouria, "Hierarchical GDSII based fracturing and jobdeck system", Proc.of SPIE 4562
    • Proc. of SPIE , vol.4562
    • Cobb, N.1    Sahouria, E.2
  • 8
    • 0036456512 scopus 로고    scopus 로고
    • High performance hierarchical fracturing
    • N. Cobb, W. Zhang, "High performance hierarchical fracturing", Proc.of SPIE 4754 p. 91-96
    • Proc. of SPIE , vol.4754 , pp. 91-96
    • Cobb, N.1    Zhang, W.2
  • 10
    • 0036030920 scopus 로고    scopus 로고
    • Approaching the one billion transistor logic product: Process and design challenges
    • G.E.Sery, "Approaching the one billion transistor logic product: Process and design challenges", Proc. of SPIE 4692.
    • Proc. of SPIE , vol.4692
    • Sery, G.E.1

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.