Shape change of self-organized NbOx nanopillar arrays by high density plasma etching

Electrochemical and Solid-State Letters

Volumn 8, Issue 9, 2005, Pages

  Park, Ik Hyun ^a   Lee, Jang Woo ^a   Jeong, Soo Hwan ^b   Chung, Chee Won ^a  

^a Inha University   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; FABRICATION; NANOSTRUCTURED MATERIALS; PLASMA ETCHING;

ETCH PARAMETERS; NANOPILLAR ARRAYS; PLASMA REACTIVE ION ETCHING;

NIOBIUM COMPOUNDS;

EID: 25144443191     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1990027     Document Type: Article

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