Synthesis of Si Nanostrutures via Self-organized Pillar Mask

Chemistry of Materials

Volumn 16, Issue 9, 2004, Pages 1612-1614

  Jeong, Soo Hwan ^a   Cha, Young Kwan ^a   Yoo, In K ^a   Song, Young Soo ^b   Chung, Chee Won ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Inha University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; MASKS; REACTIVE ION ETCHING; SILICON; SYNTHESIS (CHEMICAL);

NANODOT ARRAYS; PILLAR MASKS;

NANOSTRUCTURED MATERIALS;

ALUMINUM OXIDE; SILICON; TANTALUM; TANTALUM OXIDE; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL STRUCTURE; DENSITY; NANOPARTICLE; PARTICLE SIZE; POROSITY; REACTION ANALYSIS; SYNTHESIS;

EID: 2342591401     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm0497677     Document Type: Article

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