Serpentine spring corner designs for micro-electro-mechanical systems optical switches with large mirror mass

Optical Review

Volumn 12, Issue 4, 2005, Pages 339-344

  Su, Guo Dung John ^a   Hung, Shao Hsuan ^a   Jia, Dexin ^a   Jiang, Fukang ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b Umachines Inc   (United States)

Author keywords

Corner effects; Failure modes; MEMS; Optical switches; Reliability; Serpentine springs

Indexed keywords

EID: 24944560727     PISSN: 13406000     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10043-005-0339-9     Document Type: Article

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