Rotating dust ring in an RF discharge coupled with a dc-magnetron sputter source. Experiment and simulation

Journal of Physics D: Applied Physics

Volumn 37, Issue 19, 2004, Pages 2703-2708

  Matyash, K ^a   Frohlich M ^b   Kersten, H ^a   Thieme, G ^b   Schneider, R ^c   Hannemann, M ^a   Hippler, R ^b  

^a Inst N Greifswald   (Germany)

^b UNIVERSITY OF GREIFSWALD   (Germany)

^c MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; MAGNETRONS; PERMANENT MAGNETS; PLASMA DIAGNOSTICS; SURFACE PHENOMENA;

DUST GRAINS; ION DRAG FORCES; PARTICLE-IN-CELL SIMULATIONS; THERMAL ENERGY;

PLASMAS;

EID: 5744224791     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/19/013     Document Type: Article

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