High q film bulk acoustic resonator from 2.4 to 5.1GHZ

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 805-808

  Pang, Wei ^a   Zhang, Hao ^a   Whangbo, Sangwoo ^a   Kim, Eun Sok ^a  

^a University of Southern California ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC WAVES; APPLICATION SPECIFIC INTEGRATED CIRCUITS; CMOS INTEGRATED CIRCUITS; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; RESONANCE; SCANNING ELECTRON MICROSCOPY; SECOND HARMONIC GENERATION; THIN FILMS;

BRAGG REFLECTORS; ENERGY LEAKAGE; FILM-BULK ACOUSTIC WAVE RESONATORS (FBAR); POLYCRYSTALLINE FILMS;

ACOUSTIC RESONATORS;

EID: 3042701346     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. th Annual Frequency Control Symposium, 1986, pp. 206-210.
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4. U.S Patent 6,424,237, R. Ruby et al., Agilent Technologies, "Bulk acoustic resonator perimeter reflection system," July 23, 2002.
5. Robert Aigner, et al., "Bulk-acoustic-wave filters: perfomance optimization and volume manufacturing," Microwave Symposium Digest, 2003, pp. 2001-2004.
6. R. Ruby, et al., "Thin film bulk wave acoustic resonators (FBAR) for wireless applications," IEEE Ultrasonics Symposium, 2001, pp. 813-821.
7. M. Ylilammi, et al., "Thin film bulk acoustic wave filter," Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, Volume: 49 Issue: 4, Apr 2002, pp.535-539.
8. Motoaki Hara, et al., "Aluminum nitride based film bulk wave acoustic resonator using germanium sacrificial layer etching," Digest Tech. Papers Transducers'03 Conference, pp. 1780-1784.