Observation of subsurface structures using high-energy SEM

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue II, 2005, Pages 798-806

  Matsui, Miyako ^a   Machida, Syuntaro ^a   Todokoro, Hideo ^b   Otaka, Tadashi ^b   Sugimoto, Aritoshi ^b  

^a HITACHI LTD   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

3 D; Electron; High energy SEM; Subsurface; Underlying structure

Indexed keywords

BACKSCATTERING; ELECTRON BEAMS; ELECTRON ENERGY LEVELS; GATES (TRANSISTOR); INTEGRATED OPTOELECTRONICS; OPTICAL INTERCONNECTS;

INCIDENT ELECTRONS; LINE STRUCTURES; LINE-EDGE ROUGHNESS; SPATIAL RESOLUTIONS;

SCANNING ELECTRON MICROSCOPY;

EID: 24644484285     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.597269     Document Type: Conference Paper

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