Shape control using sidewall imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 232-238

  Su, Bo ^a   Oshana, Ramiel ^a   Menaker, Mina ^a   Barak, Yogev ^a   Shi, Xuelong ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; FEEDBACK CONTROL; IMAGE ANALYSIS; SCANNING ELECTRON MICROSCOPY; STATISTICAL PROCESS CONTROL;

CRITICAL DIMENSIONS (CD); SHAPE CONTROL; SIDEWALL IMAGING;

PHOTORESISTS;

EID: 0033690619     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)