Metallic submicrometer sieves fabricated by interferometric lithography and electroforming

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages 1932-1937

  Gutierrez Rivera, Luis E ^a   De Carvalho, Edson J ^a   Silva, Maria Aparecida ^a   Cescato, Lucila ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROFORMING; FILTRATION; LITHOGRAPHY; NICKEL; SIEVES;

INTERFEROMETRIC LITHOGRAPHY; LASER INTERFERENCE LITHOGRAPHY; METALLIC SUBMICROMETER SIEVES; NICKEL ELECTROFORMING;

LASER BEAM EFFECTS;

EID: 24644466764     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/020     Document Type: Article

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