Exploring the limits of low cost, organics-compatible high-k ceramic thin-films for embedded decoupling applications

Proceedings - Electronic Components and Technology Conference

Volumn 2, Issue , 2005, Pages 1215-1221

  Balaraman, Devarajan ^a   Raj, P M ^a   Abothu, Robin ^a   Bhattacharya, S ^a   Sacks, Michael ^a   Lance, Michael ^b   Meyer, Harry ^b   Swaminathan, Madhavan ^a   Tummala, Rao ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BREAKDOWN STRENGTHS; RF-SPUTTERING; STRUCTURAL DEFECTS;

CAPACITANCE; CERAMIC MATERIALS; COSTS; HYDROTHERMAL SYNTHESIS; LEAKAGE CURRENTS; METAL FOIL; PERMITTIVITY; PEROVSKITE; SOL-GELS; SPUTTERING; STOICHIOMETRY; TITANIUM;

THIN FILMS;

EID: 24644462435     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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