Preparation of SrTiO3 Films on sapphire substrate by RF magnetron sputtering

Vacuum

Volumn 51, Issue 2, 1998, Pages 141-143

  Loginov, V E ^a   Hollmann, E K ^a   Kozyrev, A B ^a   Prudan, A M ^a  

^a SAINT PETERSBURG ELECTROTECHNICAL UNIVERSITY LETI   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ARGON; CERIUM COMPOUNDS; CRYSTAL STRUCTURE; DIELECTRIC PROPERTIES OF SOLIDS; FILM PREPARATION; MAGNETRON SPUTTERING; OXYGEN; SAPPHIRE; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; SUBSTRATES;

CERIA; STRONTIUM TITANATE;

DIELECTRIC FILMS;

EID: 0032184112     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00146-8     Document Type: Article

References (4)

1. Vendik, O. G., Mironenko, I. G. and Ter-Martirosyan, L. T., Ferroelectrics, 1993, 14, 33.
2. Gerbinder, J. and Meixner, H., J. Appl. Phys., 1990, 67, 7453.
3. Balashova, E. V., Gol'tsman, B. M., Efimov, T. P., Zaitseva, N. V., Mosina, G. N. and Sorokin, L. M., Physics of the Solid State, 1993, 35, 227.
4. Wu, X. D., Dye, R. C., Muenchausen, R. E. et al., Appl. Phys. Lett., 1991, 58, 2165.