Study of Co- and Ni-based ohmic contacts to n-type 4H-SiC

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 1149-1153

  Yang, S J ^a   Kim, C K ^a   Noh, I H ^a   Jang, S W ^a   Jung, K H ^b   Cho, N I ^b  

^a Soonchunhyang University   (South Korea)

^b SunMoon University   (South Korea)

Author keywords

Ohmic contact; Silicon carbide; Sputtering; Transmission line method

Indexed keywords

ANNEALING; COBALT; NICKEL; OHMIC CONTACTS; SPUTTERING;

CONTACT RESISTANCE; STRUCTURAL STABILITY; SURFACE RESISTIVITY; TRANSMISSION LINE TECHNIQUES;

SILICON CARBIDE;

DIAMOND;

EID: 2442591657     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.10.067     Document Type: Article

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