Thermally actuated, bi-stable, snapping silicon membranes

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1411-1414

  Arya, R ^a   Rashid, M M ^a   Howard, D ^a   Collins, S D ^a   Smith, R L ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Actuators; Aluminum; Biomembranes; Fabrication; Finite element methods; Microrelays; Microvalves; Plasma temperature; Silicon; Switches

Indexed keywords

ACTUATORS; ALUMINUM; ALUMINUM COATINGS; FABRICATION; FINITE ELEMENT METHOD; MEMBRANES; MICROSYSTEMS; SILICON; SILICON OXIDES; SILICON WAFERS; SWITCHES; TRANSDUCERS;

BIOMEMBRANES; MEMBRANE FABRICATION; MICRO VALVES; MICRORELAYS; NON-LINEAR FINITE-ELEMENT ANALYSIS; PLASMA TEMPERATURE; TEMPERATURE DECREASE; TEMPERATURE RANGE;

SOLID-STATE SENSORS;

EID: 2442578826     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217039     Document Type: Conference Paper

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