Buckled membranes for microstructures

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 188-192

  Popescu, Dan S ^a   Lammerink, Theo S J ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); CALCULATIONS; LOADS (FORCES); MEMBRANES; MICROSTRUCTURE; PLATES (STRUCTURAL COMPONENTS); SEMICONDUCTING SILICON; SILICA; STRAIN; STRESSES;

BUCKLED MEMBRANES; COMPRESSIVE STRESS; DEFLECTION; MICROMACHINED STRUCTURES;

BUCKLING;

EID: 0028098355     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)