A MEMS based optical fiber scanning probe

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 207-208

  McCormick, Daniel T ^a,b   Tien, N C ^a  

^a University of California   (United States)

^b Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MOEMS; OPTICAL FIBERS;

BULK-MICROMACHINED; ELECTROSTATIC COMB DRIVES; OPTICAL FIBER SCANNING;

SCANNING;

EID: 84963728544     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031514     Document Type: Conference Paper

References (3)

1. D. Huang, E. Swanson, C. Lin, J. Schuman, W. Stinson, W. Chang, M. Hee, T. Flotte, K. Gregory, C. Puliafito, and J. Fujimoto, "Optical coherence tomography," Science 254, pp. 1178-1181, 1991.
2. Z. Chen, Y. Zhao, S. Srinivas, J. Nelson, N. Prakash, and R. Frostig, "Optical doppler tomography," IEEE J. of Selected Topics in Quantum Electronics 5, pp. 1134-41, 1999.
3. K. Shaw, Z. Zhang, and N. MacDonald, "Scream i: A single mask, single-crystal silicon process for microelectromechanical structures," Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS '93), pp. 155-169, 1993.