A self-sensing thermal actuator incorporating micromirror for tracking mechanism of optical drive

Proceedings of IEEE Sensors

Volumn 2, Issue , 2004, Pages 900-903

  Yang, J P ^a   Deng, X C ^a,b   Chong, T C ^a,b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Micromirror; Optical drive; Piezoresistive sensor; Thermal actuator

Indexed keywords

BANDWIDTH; CANTILEVER BEAMS; ELECTRIC POTENTIAL; FEEDBACK CONTROL; FIBER OPTICS; MIRRORS; SENSITIVITY ANALYSIS; SENSORS;

MICROMIRROR; OPTICAL DRIVE; PIEZORESISTIVE SENSORS; THERMAL ACTUATOR;

ACTUATORS;

EID: 24144436694     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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