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Volumn 20, Issue 9, 2005, Pages 932-937

Fringing effects of V-shape gate metal on GaAs/InGa/PInGaAs doped-channel field-effect transistors

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; HETEROJUNCTIONS; PHOTORESISTS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DOPING;

EID: 23944525428     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/20/9/008     Document Type: Article
Times cited : (4)

References (10)
  • 2
    • 1242310596 scopus 로고    scopus 로고
    • Sub-0.5-νm gate doped-channel field-effect transistors with HEMT-like channel using thermally reflowed photoresist and spin-on glass
    • Tan S W, Chen W T, Chu M Y and Lour W S 2004 Sub-0.5-νm gate doped-channel field-effect transistors with HEMT-like channel using thermally reflowed photoresist and spin-on glass Semicond. Sci. Technol. 19 167
    • (2004) Semicond. Sci. Technol. , vol.19 , Issue.2 , pp. 167
    • Tan, S.W.1    Chen, W.T.2    Chu, M.Y.3    Lour, W.S.4
  • 4
    • 0035797484 scopus 로고    scopus 로고
    • Formation of submicron T-gate by rapid thermally reflowed resist with metal transfer layer
    • Meng C C, Liao G R and Lu S S 2001 Formation of submicron T-gate by rapid thermally reflowed resist with metal transfer layer Electron. Lett. 37 1045
    • (2001) Electron. Lett. , vol.37 , Issue.16 , pp. 1045
    • Meng, C.C.1    Liao, G.R.2    Lu, S.S.3
  • 5
    • 0016496535 scopus 로고
    • V-shaped-gate GaAs MESFET for improved high-frequency performance
    • Kohn E 1975 V-shaped-gate GaAs MESFET for improved high-frequency performance Electron. Lett. 11 160
    • (1975) Electron. Lett. , vol.11 , Issue.8 , pp. 160
    • Kohn, E.1
  • 6
    • 0035446925 scopus 로고    scopus 로고
    • A process form the formation of submicron V-gate by micromachined V-grooves using GaInP/GaAs selective etching technique
    • Chiu H W, Ho N S and Lu S S 2001 A process form the formation of submicron V-gate by micromachined V-grooves using GaInP/GaAs selective etching technique IEEE Electron Device Lett. 22 420
    • (2001) IEEE Electron Device Lett. , vol.22 , Issue.9 , pp. 420
    • Chiu, H.W.1    Ho, N.S.2    Lu, S.S.3
  • 7
    • 1642348587 scopus 로고    scopus 로고
    • Sub-0.25 micron gate-like heterojunction doped-channel FETs with a controllable notch-angle V-gate
    • Tan S W, Hsu M K, Lin A H, Chu M Y, Chen W T and Lour W S 2004 Sub-0.25 micron gate-like heterojunction doped-channel FETs with a controllable notch-angle V-gate Semicond. Sci. Technol. 18 384
    • (2004) Semicond. Sci. Technol. , vol.18 , pp. 384
    • Tan, S.W.1    Hsu, M.K.2    Lin, A.H.3    Chu, M.Y.4    Chen, W.T.5    Lour, W.S.6
  • 9
    • 0004022746 scopus 로고    scopus 로고
    • Silvaco International 2000 ATLAS User's Manual (Santa Clara, CA: Silvaco International)
    • (2000) ATLAS User's Manual


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.