Reduction of diffraction effect for fabrication of very high aspect ratio microchannels in SU-8 over large area by soft cushion technology

Microsystem Technologies

Volumn 11, Issue 7, 2005, Pages 519-525

  Zhang, Jun ^a   Chan Park, Mary B ^a   Miao, Jianmin ^a   Sun, Tie T ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Dense grating; Diffraction; Edge bead; High aspect ratio; SU 8

Indexed keywords

ION BEAM LITHOGRAPHY; MICROSTRUCTURE; OPTICAL FIBER FABRICATION; ORGANIC SOLVENTS; PHOTORESISTORS; REFRACTIVE INDEX; SILICON WAFERS; SPIN COATING; ULTRAVIOLET RADIATION;

DENSE GRATINGS; EDGE BEAD; HIGH ASPECT RATIO; SU-8;

DIFFRACTION GRATINGS;

EID: 23844531665     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0586-5     Document Type: Review

References (10)

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