Advanced analog metal and passives integration

Advanced Metallization Conference (AMC)

Volumn , Issue , 2004, Pages 37-43

  Stamper, A K ^a   Chinthakindi, A K ^a   Coolbaugh, D D ^a   Downes, K ^a   Eshun, E E ^a   Erturk, M ^a   He, Z X ^a   Groves, R A ^a   Lindgren, P ^a   Ramachandran, V ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG AND MIXED SIGNAL (AMS); CARBON-DOPED OXIDE (CDO); METAL-INSULATOR-METAL (MIM); THIN FILM RESISTORS; VERTICAL PARALLEL PLATE CAPACITORS;

CAPACITORS; CARBON; ELECTRIC CURRENTS; REFRACTORY METAL COMPOUNDS; SEMICONDUCTOR DOPING; THIN FILM TRANSISTORS;

CMOS INTEGRATED CIRCUITS;

EID: 23844526859     PISSN: 15401766     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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