Impurity determination in narrow copper lines

Advanced Metallization Conference (AMC)

Volumn , Issue , 2004, Pages 347-352

  Zhang, W ^a,b   Brongersma, S H ^a   Conard, T ^a   Vandervorst, W ^a,b   Maex, K ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIVES; CONCENTRATION (PROCESS); ELECTROPLATING; GRAIN GROWTH; IMPURITIES; METALLIZING; SECONDARY ION MASS SPECTROMETRY;

GRAIN GROWTH RETARDATION; IMPURITY CONCENTRATION; IMPURITY DETERMINATION; INORGANIC ADDITIVES;

COPPER;

EID: 23844488785     PISSN: 15401766     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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