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Volumn 41, Issue 12, 2002, Pages 7338-7344

Narrow trench corrosion of copper damascene interconnects

a IMEC (Belgium)

Author keywords

Chemical mechanical polishing; Copper; Corrosion; Damascene; Etching; Inorganic; Interconnection; LSI; Organic

Indexed keywords

ACETIC ACID; CHEMICAL MECHANICAL POLISHING; ETCHING; INORGANIC ACIDS; PITTING; SOLUTIONS;

DAMASCENE INTERCONNECTS;

COPPER CORROSION;

EID: 0036991675 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.41.7338 Document Type: Article

Times cited : (23)

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