Ceramic thin films by sol-gel processing as novel materials for integrated humidity sensors

Sensors and Actuators, B: Chemical

Volumn 31, Issue 1-2, 1996, Pages 59-70

  Traversa, Enrico ^a   Gnappi, Guglielmina ^b   Montenero, Angelo ^c   Gusmano, Gualtiero ^a  

^a UNIVERSITY OF ROME TOR VERGATA   (Italy)

^b CoRIVe ^*  (Italy)

^c UNIVERSITY OF PARMA   (Italy)

Author keywords

Alkali doped TiO2; Humidity sensors; Iron oxides; Sol gel; Thin films

Indexed keywords

ALKALI METALS; ALUMINA; CERAMIC MATERIALS; DEPOSITION; DOPING (ADDITIVES); ELECTRIC PROPERTIES; HEATING; IRON OXIDES; SENSORS; SOL-GELS; TITANIUM DIOXIDE;

DIP COATING; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; HUMIDITY SENSORS; SOL GEL PROCESSING;

THIN FILMS;

EID: 0030086747     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-4005(96)80017-7     Document Type: Article

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