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Volumn 50, Issue 23 SPEC. ISS., 2005, Pages 4615-4620
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Chemical, morphological and nano-mechanical characterizations of Al 2O3 thin films deposited by metal organic chemical vapour deposition on AISI 304 stainless steel
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Author keywords
Alumina coatings; Hardness; MOCVD; Nano indentation; Wear protection
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHEMICAL VAPOR DEPOSITION;
ELASTIC MODULI;
HARDNESS;
HEAT TREATMENT;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
STAINLESS STEEL;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
ALUMINA COATING;
NANO-INDENTATION;
STAINLESS STEEL SUBSTRATES;
WEAR PROTECTION;
ALUMINUM COMPOUNDS;
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EID: 23844483224
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/j.electacta.2004.10.097 Document Type: Article |
Times cited : (36)
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References (23)
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