Preparation of aluminum oxide films by ion beam assisted deposition

Surface and Coatings Technology

Volumn 131, Issue 1-3, 2000, Pages 187-191

  Shimizu, I ^a   Setsuhara, Y ^a   Miyake, S ^a   Kumagai, M ^b   Ogata, K ^c   Kohata, M ^d   Yamaguchi, K ^e  

^a OSAKA UNIVERSITY   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^c NISSIN ELECTRIC CO LTD   (Japan)

^d TOSHIBA CORPORATION   (Japan)

^e Kyoto Research Park ^*  (Japan)

Author keywords

Al2O3; Aluminum oxide films; Crystallization; Refractive index; Vickers hardness

Indexed keywords

ALUMINUM OXIDE; COATING; FILM; VAPOR DEPOSITION; WEAR RESISTANCE;

EID: 0034536498     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00823-9     Document Type: Conference Paper

References (17)