Thermal effects in suspended RF spiral inductors

IEEE Electron Device Letters

Volumn 26, Issue 8, 2005, Pages 541-543

  Sagkol, H ^a   Sinaga, S ^a   Burghartz, J N ^a   Rejaei, B ^a   Akhnoukh, A ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Micromachining; Radio frequency (RF) circuits; Spiral inductor; Suspended inductor; Thermal effects

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; ELECTRIC COILS; ELECTRIC CURRENTS; MICROMACHINING; THERMAL EFFECTS;

RADIO FREQUENCY (RF) CIRCUITS; SPIRAL INDUCTOR; SUSPENDED INDUCTOR;

ELECTRIC INDUCTORS;

EID: 23844479542     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2005.852524     Document Type: Article

References (10)

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