Kinetic theory of stochastically heated RF capacitive discharges

IEEE Transactions on Plasma Science

Volumn 26, Issue 1, 1998, Pages 59-68

  Wang, Zuoding ^a   Lichtenberg, Allan J ^b   Cohen, Ronald H ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Capacitive rf discharge; Kinetic theory; Nonlocal kinetics

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRON BEAMS; KINETIC THEORY; PLASMA SHEATHS; PROBABILITY DENSITY FUNCTION;

ELECTRON ENERGY PROBABILITY DISTRIBUTION FUNCTION (EEPF); RADIO FREQUENCY (RF) CAPACITIVE DISCHARGES;

PLASMA HEATING;

EID: 0032001498     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.659533     Document Type: Article

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