Characterization of Pt oxide thin film fabricated by plasma immersion ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 237, Issue 1-2, 2005, Pages 296-300

  Chen, Yi Chan ^a   Sun, Yu Ming ^a   Yu, Shih Ying ^a   Hsiung, Chang Po ^a   Gan, Jon Yiew ^a   Kou, Chwung Shan ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Grazing incident X ray diffraction (GIXD); Plasma immersion ion implantation (PIII); X ray photoemission spectrometry (XPS)

Indexed keywords

ION IMPLANTATION; OXIDES; PLASMAS; PLATINUM; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

BINDING STATE; GRAZING-INCIDENT X-RAY DIFFRACTION (GIXD); OXYGEN IMPLANTATION; PLASMA IMMERSION ION IMPLANTATION (PIII);

THIN FILMS;

EID: 23444459390     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.05.014     Document Type: Conference Paper

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