Removal of AFM moiré measurement errors due to non-linear scan and creep of probe

Nanotechnology

Volumn 16, Issue 9, 2005, Pages 1681-1686

  Su, Fei ^a   Wei, Jun ^a   Liu, Yuchan ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

AFM PROBE; FRINGE DISTORTION; FRINGE PATTERN; NON-LINEAR SCAN;

ATOMIC FORCE MICROSCOPY; CREEP; ERROR ANALYSIS; HOLOGRAPHY; IMAGE ANALYSIS; NONLINEAR SYSTEMS; PROBES;

MICROSCOPES;

EID: 23444448104     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/9/045     Document Type: Article

References (10)

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