Hydrogen sensing characteristics of a Pt-oxide-Al0.3Ga 0.7As MOS Schottky diode

Sensors and Actuators, B: Chemical

Volumn 99, Issue 2-3, 2004, Pages 425-430

  Cheng, Chin Chuan ^b   Tsai, Yan Ying ^b   Lin, Kun Wei ^a   Chen, Huey Ing ^b   Lu, Chun Tsen ^b   Liu, Wen Chau ^b  

^a CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

AlGaAs Schottky diode; Hydrogen sensors; Response time; Thermodynamic

Indexed keywords

FABRICATION; HYDROGEN; HYDROGEN FUELS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOS DEVICES; PLATINUM COMPOUNDS; REACTION KINETICS; SCHOTTKY BARRIER DIODES;

HYDROGEN DETECTION SENSITIVITY; HYDROGEN SENSING; HYDROGEN SENSORS;

CHEMICAL SENSORS;

EID: 2342648050     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2003.12.011     Document Type: Article

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