|
Volumn 30, Issue 6, 1997, Pages 1138-1140
|
CVD coating of Si3N4 ultra-fine particles with AIN in CO-current moving bed reactor
a a a |
Author keywords
Co Current; Coating; CVD; Moving Bed; Ultra Fine Particle
|
Indexed keywords
AGGLOMERATION;
ALUMINUM COMPOUNDS;
CHEMICAL REACTORS;
CHEMICAL VAPOR DEPOSITION;
COATINGS;
PARTICLES (PARTICULATE MATTER);
ALUMINUM CHLORIDE;
ALUMINUM NITRIDE;
COCURRENT MOVING BED REACTORS;
SOLIDS RESIDENCE TIME;
SILICON NITRIDE;
MOVING BED REGIME;
VAPOR DEPOSITION;
|
EID: 0031395307
PISSN: 00219592
EISSN: None
Source Type: Journal
DOI: 10.1252/jcej.30.1138 Document Type: Article |
Times cited : (10)
|
References (4)
|