Temperature behavior of the APSFET - A porous silicon-based FET gas sensor

Sensors and Actuators, B: Chemical

Volumn 100, Issue 1-2, 2004, Pages 185-189

  Barillaro, Giuseppe ^a   Nannini, Andrea ^a   Pieri, Francesco ^a   Strambini, Lucanos M ^a  

^a UNIVERSITY OF PISA   (Italy)

Author keywords

Alcohol substances; Gas sensor; Polar molecules; Porous silicon

Indexed keywords

ADSORPTION; AGING OF MATERIALS; ALCOHOLS; CHARGE CARRIERS; CHEMICAL SENSORS; CRYSTALLINE MATERIALS; ELECTRIC CURRENTS; FIELD EFFECT TRANSISTORS; INTERFACES (MATERIALS); MODULATION; OXIDATION; PLASMA ETCHING; POLARIZATION; THERMAL EFFECTS;

ALCOHOL SUBSTANCES; PHYSICAL ADSORPTION; POLAR MOLECULES; SENSOR CURRENTS;

POROUS SILICON;

EID: 2342568937     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2003.12.050     Document Type: Article

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