SCOPUS 정보 검색 플랫폼

Materials Science and Engineering: B

Volumn 109, Issue 1-3, 2004, Pages 64-68

VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics

(5) Boher, P a Defranoux, C a Heinrich, P a Wolstenholme, J b Bender, H c

a SOPRA (France)

b Thermo VG Scientific (United Kingdom)

c IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; FLUORESCENCE; INTERFACES (MATERIALS); LIGHT ABSORPTION; PERMITTIVITY; PHOTOEMISSION; REFRACTIVE INDEX; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET SPECTROSCOPY; X RAY SPECTROSCOPY;

X-RAY FLUORESCENCE (XRF) ANALYSIS; X-RAY PHOTOEMISSION (XPS); X-RAY REFLECTOMETRY (XRR);

DIELECTRIC MATERIALS;

EID: 2342557276 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2003.10.117 Document Type: Conference Paper

Times cited : (24)

References (11)

1
- 0035872897
- Wilk G.D., Wallace R.M., Anthony J.M. J. Appl. Phys. 89:2001;5243-5275.
- (2001) J. Appl. Phys. , vol.89 , pp. 5243-5275
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

2
- 0030291621
- Hubbard K.J., Schlom D.G. J. Mater. Res. 11:1996;2757.
- (1996) J. Mater. Res. , vol.11 , pp. 2757
- Hubbard, K.J.¹ Schlom, D.G.²

3
- 0034187380
- Robertson J. J. Vac. Sci. Technol. B18:2000;1785.
- (2000) J. Vac. Sci. Technol. , vol.B18 , pp. 1785
- Robertson, J.¹

4
- 0034454056
- D.A. Buchanan, E.P. Gusev, E. Cartier, H. Okorn-Schmidt, K. Rim, M.A. Gribelyuk, IEDM Technical Digest, 2000, p. 223.
- (2000) IEDM Technical Digest , pp. 223
- Buchanan, D.A.¹ Gusev, E.P.² Cartier, E.³ Okorn-Schmidt, H.⁴ Rim, K.⁵ Gribelyuk, M.A.⁶

5
- 85166145511
- E.P. Gusev, D.A. Buchanan, E. Cartier, A. Kumar, D. DiMaria, S. Guha, IEEE, 2001
- E.P. Gusev, D.A. Buchanan, E. Cartier, A. Kumar, D. DiMaria, S. Guha, IEEE, 2001.

6
- 35148821130
- M. Hirose, S. Sakai, H. Iwai, (Eds.), Business Center for Academic Societies, Japan, Tokyo
- H. Bender, T. Conard, H. Nohira, J. Pétry, O. Richard, C. Zhao, B. Brijs, W. Besling, C. Detavernier, W. Vandervorst, M. Caymax, S. De Gendt, J. Chen, J. Kluth, W. Tsai, J.W. Maes, In: M. Hirose, S. Sakai, H. Iwai, (Eds.), Extended Abstracts of International Workshop on Gate Insulator, Business Center for Academic Societies, Japan, Tokyo, 2001, p. 86-92.
- (2001) Extended Abstracts of International Workshop on Gate Insulator , pp. 86-92
- Bender, H.¹ Conard, T.² Nohira, H.³ Pétry, J.⁴ Richard, O.⁵ Zhao, C.⁶ Brijs, B.⁷ Besling, W.⁸ Detavernier, C.⁹ Vandervorst, W.¹⁰ Caymax, M.¹¹ De Gendt, S.¹² Chen, J.¹³ Kluth, J.¹⁴ Tsai, W.¹⁵ Maes, J.W.¹⁶

7
- 0003512127
- Boston
- P. Boher, J.P. Piel, J.L. Stehle, MRS Fall meeting, Boston, 1999.
- (1999) MRS Fall Meeting
- Boher, P.¹ Piel, J.P.² Stehle, J.L.³

8
- 0242581069
- Strasbourg
- P. Boher, P. Evrard, J.P. Piel, J.L. Stehle, EMRS Spring meeting, Strasbourg, 2000.
- (2000) EMRS Spring Meeting
- Boher, P.¹ Evrard, P.² Piel, J.P.³ Stehle, J.L.⁴

9
- 85166092412
- Paris, 27 April-3 May
- P. Boher, C. Defranoux, S. Bourtault, H. Bender, ECS Conference, Paris, 27 April-3 May 2003.
- (2003) ECS Conference
- Boher, P.¹ Defranoux, C.² Bourtault, S.³ Bender, H.⁴

10
- 31944442603
- Suntola T. Mater. Sci. Rept. 4:1989;261-312.
- (1989) Mater. Sci. Rept. , vol.4 , pp. 261-312
- Suntola, T.¹

11
- 36549094998
- Aspnes D., Kelso S., Logan R., Bhat R. J. Appl. Phys. 60:1986;754.
- (1986) J. Appl. Phys. , vol.60 , pp. 754
- Aspnes, D.¹ Kelso, S.² Logan, R.³ Bhat, R.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.