Size-dependent resonant tunneling and storing of electrons in a nanocrystalline silicon floating-gate double-barrier structure

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 2, 2004, Pages 678-681

  Wu, Liangcai ^a   Dai, Min ^a   Huang, Xinfan ^a   Li, Wei ^a   Chen, Kunji ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITANCE; ELECTRON ENERGY LEVELS; EQUIVALENT CIRCUITS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; OHMIC CONTACTS; OXIDATION; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESONANT TUNNELING; SEMICONDUCTOR QUANTUM DOTS; SILICA; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

CAPACITANCE SPECTROSCOPY; COULOMB BLOCKADES; PLASMA OXIDATION; QUANTUM-CONFINEMENT EFFECTS;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 2342483749     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1676527     Document Type: Article

References (10)

1. S. Banerjee, S. Y. Huang, T. Yamanaka, and S. Oda, J. Vac. Sci. Technol. B 20, 1135 (2002).
2. S. Y. Huang, S. Banerjee, R. T. Tung, and S. Oda, J. Appl. Phys. 93, 576 (2003).
3. A. Nakajima, T. Futatsugi, K. Kosemura, T. Fukano, and N. Yokoyama, J. Vac. Sci. Technol. B 17, 2163 (1999).
4. Y. Soi, K. Saito, H. Ishikuro, and T. Hiramoto, J. Appl. Phys. 84, 2358 (1998).
5. D. N. Kouvatsos, V. Ioannou-Sougleridis, and A. G. Nassiopoulou, Appl. Phys. Lett. 82, 397 (2003).
6. A. Nakajima, T. Futatsugi, K. Kosemura, T. Fukano, and N. Yokoyama, Appl. Phys. Lett. 70, 1742 (1997).
7. S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, E. F. Crabbe, and K. Chan, Appl. Phys. Lett. 68, 1377 (1996).
8. G. Medeiros-Ribeiro, J. M. Garcia, and P. M. Petroff, Phys. Rev. B 55, 1568 (1997).
9. R. J. Luyken, A. Lorke, A. O. Govorov, J. P. Kotthaus, G. Medeiros-Ribeiro, and P. M. Petroff, Appl. Phys. Lett. 74, 2486 (1999).
10. R. C. Ashoori, H. L. Stormer, J. S. Weiner, L. N. Pfeiffer, K. W. Baldwin, and K. West, Phys. Rev. Lett. 71, 613 (1993).