Development of electron beam ion source for nanoprocesses

Shinku/Journal of the Vacuum Society of Japan

Volumn 48, Issue 5, 2005, Pages 317-320

  Sakurai, Makoto ^a   Nakajima, Fumiharu ^a   Fukumoto, Takunori ^a   Nakamura, Nobuyuki ^b   Ohtani, Shunsuke ^b   Mashiko, Shinro ^c  

^a KOBE UNIVERSITY   (Japan)

^b UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^c NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELECTRONS; EXTRACTION; NANOTECHNOLOGY; REFRIGERATORS; VACUUM APPLICATIONS;

ELECTRON BEAM ION SOURCE; ION PRODUCTION; MAGNET CHAMBERS; VACUUM CHAMBERS;

ION SOURCES;

EID: 23344441103     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.48.317     Document Type: Article

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