Characterization of electromechanical coupling coefficients of piezoelectric films using composite resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 5, 1999, Pages 1327-1330

  Wang, Zuoging ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC TRANSDUCERS; ELECTRIC IMPEDANCE; MATHEMATICAL MODELS; NATURAL FREQUENCIES; RESONATORS; THIN FILMS;

COMPOSITE RESONATORS; ELECTROMECHANICAL COUPLING COEFFICIENT; PIEZOELECTRIC THIN FILMS;

PIEZOELECTRIC MATERIALS;

EID: 0033276877     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.796138     Document Type: Article

References (6)

1. L. Zuo, M. Sayer, and C.-K. Jen, "Sol-gel fabricated thick piezoelectric ultrasonic transducers for potential applications in industrial material processes," in Proc. 1997 IEEE Ultrason. Symp., Toronto, ON, Canada, pp. 1007-1011.
2. F. S. Hickernell, "Measurement techniques for evaluating piezoelectric thin films," in Proc. 1996 IEEE Ultrason. Symp., San Antonio, TX, pp. 235-242.
3. B. S. Naik, J. J. Lutsky, R. Reif, and C. D. Sodini, "Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator," IEEE Trans. Ultrason., Ferroelect., Freq. Oontr., vol, 45, no. 1, pp. 257-263, 1998.
4. E. K. Sittig, "Design and technology of piezoelectric transducers for frequencies above 100 MHz," in Physical Acoustics, vol. IX, W. P. Mason and R. N. Thurston, Eds. New York: Academic Press, 1972, pp. 221-275.
5. D. O. Berlincourt, D. R. Curran, and H. Jaffe, "Piezoelectric and piezomagnetic materials and their function in transducers," in Physical Acoustics, vol. I Part A, W. P. Mason, Ed. New York: Academic Press, 1964, pp. 169-270.
6. IEEE Standard on Piezoelectricity, available from IEEE Customer Service, Piscataway, NJ.