SCOPUS 정보 검색 플랫폼

Journal of Materials Science

Volumn 37, Issue 8, 2002, Pages 1535-1539

X-ray absorption spectroscopy, simulation and modeling of Si-DLC films

(4) Palshin, V a Tittsworth, R C a Fountzoulas, C G b Meletis, E I c

a LOUISIANA STATE UNIVERSITY (United States)

b U S ARMY RESEARCH LABORATORY (United States)

c Louisiana State University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; COMPUTER SIMULATION; COMPUTER SOFTWARE; CRYSTALLOGRAPHY; FOURIER TRANSFORMS; ION BEAM ASSISTED DEPOSITION; IONIZATION CHAMBERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; SPECTRUM ANALYSIS; X RAY SPECTROSCOPY;

X-RAY ABSORPTION SPECTRA;

DIAMOND LIKE CARBON FILMS;

EID: 0037091222 PISSN: 00222461 EISSN: None Source Type: Journal
DOI: 10.1023/A:1014960616824 Document Type: Article

Times cited : (14)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.