Tribological behaviour of Si-DLC coatings

Surface Engineering

Volumn 15, Issue 4, 1999, Pages 301-306

  Varma, A ^a   Palshin, V ^a   Meletis, E I ^a   Fountzoulas, C ^b  

^a Louisiana State University   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; AMORPHOUS SILICON; BINDING ENERGY; CURRENT DENSITY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FRICTION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; WEAR RESISTANCE;

DIAMONDLIKE CARBON FILMS; ION BEAM ASSISTED DEPOSITION (IBAD);

PROTECTIVE COATINGS;

EID: 0032643752     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/026708499101516641     Document Type: Article

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