Production solutions in excimer laser thin film crystallization

Thin Solid Films

Volumn 487, Issue 1-2, 2005, Pages 85-88

  Brune, J ^a   Nikolaus, B ^a   Simon, F ^a  

^a Lambda Physik GmbH   (Germany)

Author keywords

ELA; Excimer laser annealing; LTPS; Poly silicon; SLS

Indexed keywords

ANNEALING; CRYSTALLIZATION; EXCIMER LASERS; GRAIN SIZE AND SHAPE; OPTICAL SYSTEMS; POLYSILICON; SOLIDIFICATION; THIN FILM TRANSISTORS;

ELA; EXCIMER LASER ANNEALING; LTPS; SLS;

THIN FILMS;

EID: 22944463306     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.01.041     Document Type: Conference Paper

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