Silicon nanocrystal memories by LPCVD of amorphous silicon, followed by solid phase crystallization and thermal oxidation

Journal of Physics: Conference Series

Volumn 10, Issue 1, 2005, Pages 31-34

  Tsoi, E ^a   Normand, P ^a   Nassiopoulou, A G ^a   Ioannou Sougleridis, V ^a   Salonidou, A ^a   Giannakopoulos, K ^b  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22544451278     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/10/1/008     Document Type: Article

References (7)

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4. Dimitrakis P et al 2004 Solid State Electron. 48 1511
5. Salonidou A Nassiopoulou A G, K Giannakopoulos, Travlos A, Ioannou-Sougleridis V and Tsoi E 2004 Nanotechnology 15 1233
6. Ioannou-Sougleridis V and Nassiopoulou A G 2003 J. Appl. Phys. 94 4084
7. Ioannou-Sougleridis V, Nassiopoulou A G and Travlos A 2003 Nanotechnology 14 1174